Implementation of Special Gases in a Research Environment within a Clean Room. We have carried out the incorporation of a range of highly specialized gases, including Chlorine (Cl2), Bromine (HBr), Oxygen (O2), Argon (Ar), Chlorine Trifluoride (CHF3), Octafluorocyclobutane (C4F8) and Sulfur Hexafluoride (SF6).

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